APPLICATION

Polishing

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Pristine polishing

Our polishing slurries serve the semiconductor and automotive industry with a range of slurries for various substrates and polishing stages. .

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Advantages

  • High purity: 99.9-99.99+%
  • Water-based suspension; binder and additive-free 
  • High solid loading, with alumina concentrations up to 70% for efficient CMP manufacturing
  • Low viscosity
  • pH 4-6 as standard, pH8+ options available

 

Our Product range

Our offer to the polishing industry is primarily acidic, alpha alumina slurries at purity ranges in the 99.9-99.99% (3N-4N) range. Both high pH and gamma slurry options are available on approval - contact us for further details.

SupAlox ON11 (70) SEM 2
SEM image of SupAlox ON11 (70)

SupALOX® alumina slurries offer the hallmark low emissions, high-purity alumina in a non-toxic, additive-free base. Contact us for requests outside the standard range.

High performance polishing slurries

PRODUCT PURITY CRYSTAL PHASE PSD (D50)/ μm BET m2/g SOLID CONTENT/ % pH
SupALOX ON11 (50) 4N ALPHA 0.27 12-15 50 4-6
SupALOX ON11 (70) 4N ALPHA 0.27 12-15 70 4-6
SupALOX OE11 (50) 3N ALPHA 0.30 12-15 50 4-6
SupALOX ON110 (70) 4N ALPHA 0.24 < 20 70 4-6

A variety of particle size profiles

SupALOX alumina slurries are supplied in various particle size distributions to suit different polishing stages and demands. 

Our slurries are provided without binder and additives and are supplied in solid content levels of up to 70% by mass. 

* - available for sampling

 

 

Polishing PSD Comparison

 

We are an ISO 9001, ISO 45001, and ISO 14001 certified company.

We are committed to excellence and sustainability. Our ISO 9001, ISO 45001, and ISO 14001 certifications reflect our dedication to quality management, occupational health and safety, and environmental responsibility

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